Diagnostic systems and methods for deep learning models configured for semiconductor applications
US11580398B2 · kind B2 · utility
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38Claims
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Key dates
| Filing date | Sep 1, 2017 |
| Grant date | Feb 14, 2023 |
| Priority date | — |
| Expiry date | Dec 6, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06V2201/06
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
Methods and systems for performing diagnostic functions for a deep learning model are provided. One system includes one or more components executed by one or more computer subsystems. The one or more components include a deep learning model configured for determining information from an image generated for a specimen by an imaging tool. The one or more components also include a diagnostic component configured for determining one or more causal portions of the image that resulted in the information being determined and for performing one or more functions based on the determined one or more causal portions of the image.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.