KLA-Tenor Corp.
9Patents
8Active
9Granted
46Portfolio score
Filing activity: Sep 7, 2001 → Sep 1, 2017 · 2 expiring within 5 years
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8142966B2 | Substrate matrix to decouple tool and process effects | Emerging Cross-Sectional Technologies | 14 | Active |
| US6570650B1 | Apparatus and methods for reducing thin film color variation in optical inspection of semiconductor devices and other surfaces | Physics | 9 | Expired |
| US10436720B2 | Adaptive automatic defect classification | Electricity | 4 | Active |
| US10079183B2 | Calculated electrical performance metrics for process monitoring and yield management | Physics | 3 | Active |
| US8146023B1 | Integrated circuit fabrication process convergence | Electricity | 3 | Active |
| US10139352B2 | Measurement of small box size targets | Physics | 2 | Active |
| US9874597B2 | Light-emitting device test systems | Physics | 1 | Active |
| US9916653B2 | Detection of defects embedded in noise for inspection in semiconductor manufacturing | Physics | 0 | Active |
| US11580398B2 | Diagnostic systems and methods for deep learning models configured for semiconductor applications | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.