Patent assignee · US · COMPANY

KLA-Tenor Corp.

9Patents
8Active
9Granted
46Portfolio score

Filing activity: Sep 7, 2001 → Sep 1, 2017 · 2 expiring within 5 years

Most-cited patents

PatentTitleAreaCited byStatus
US8142966B2 Substrate matrix to decouple tool and process effects Emerging Cross-Sectional Technologies 14 Active
US6570650B1 Apparatus and methods for reducing thin film color variation in optical inspection of semiconductor devices and other surfaces Physics 9 Expired
US10436720B2 Adaptive automatic defect classification Electricity 4 Active
US10079183B2 Calculated electrical performance metrics for process monitoring and yield management Physics 3 Active
US8146023B1 Integrated circuit fabrication process convergence Electricity 3 Active
US10139352B2 Measurement of small box size targets Physics 2 Active
US9874597B2 Light-emitting device test systems Physics 1 Active
US9916653B2 Detection of defects embedded in noise for inspection in semiconductor manufacturing Physics 0 Active
US11580398B2 Diagnostic systems and methods for deep learning models configured for semiconductor applications Physics 0 Active

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.