Patent · US Active

Cold fluid semiconductor device release during pick and place operations, and associated systems and methods

US11594432B2 · kind B2 · utility

1Cited by
2References
19Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 9, 2021
Grant dateFeb 28, 2023
Priority date
Expiry dateMay 8, 2041

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T156/1983
  • WIPO fieldAudio-visual technology
  • WIPO sectorElectrical engineering

Abstract

Systems and methods for releasing semiconductor dies during pick and place operations are disclosed. In one embodiment, a system for handling semiconductor dies comprises a support member positioned to carry at least one semiconductor die releasably attached to a support substrate. The system further includes a picking device having a pick head coupleable to a vacuum source and positioned to releasably attach to the semiconductor die at a pick station. The system still further incudes a cooling member coupleable to a cold fluid source and configured to direct a cold fluid supplied by the cold fluid source toward the support substrate at the pick station. The cold fluid cools a die attach region of the substrate where the semiconductor die is attached to the substrate to facilitate removal of the semiconductor die.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.