Replaceable end effector contact pads, end effectors, and maintenance methods
US11600580B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 24, 2020 |
| Grant date | Mar 7, 2023 |
| Priority date | — |
| Expiry date | Jan 13, 2041 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/135
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Replaceable contact pads of end effectors are provided. The contact pads support substrates in electronic device manufacturing. The contact pad includes a contact pad head having a contact surface configured to contact a substrate, a shaft coupled to the contact pad head, the shaft including a shaft indent formed between an underside of the contact pad head and a shaft end, and a circular securing member received around the shaft and seated in the shaft indent and configured to secure the contact pad to the end effector body. End effectors including replaceable contact pads and maintenance methods are described, as are additional aspects.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.