Apparatus for measuring temperature in a vacuum and microwave environment
US11630001B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 19, 2020 |
| Grant date | Apr 18, 2023 |
| Priority date | — |
| Expiry date | Apr 2, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01K13/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus for determining temperatures of substrates in microwave and/or vacuum environments. A substrate holder with a plurality of support pins includes a temperature sensor assembly with at least a portion of a surface with a phosphorous coating is configured to be inserted in at least one pin support position from an inner area of the substrate holder and in at least one pin support position from an outer area of the substrate holder. The temperature sensor assembly includes a temperature sensor pin with a spring that is microwave transparent. The temperature sensor pin is made of a material with a thermal conductivity greater than approximately 200 W/mK and a low thermal mass which is microwave transparent. An optical transmission assembly is embedded into at least a portion of the substrate holder to receive light emissions from a surface of the temperature sensor pin.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.