Inventor · Singapore, SG

Ananthkrishna Jupudi

44Patents
4h-index
62Co-inventors
62Inventor score

Filing activity: Jun 9, 2011 → Nov 21, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
USD913979S1 Inner shield for a substrate processing chamber General 25 Active
US8558299B2 Semiconductor device with gate electrode stack including low resistivity tungsten and method of forming Electricity 22 Active
US8895450B2 Low resistivity tungsten PVD with enhanced ionization and RF power coupling Electricity 15 Active
US9252002B2 Two piece shutter disk assembly for a substrate process chamber Chemistry; Metallurgy 5 Active
US10851453B2 Methods and apparatus for shutter disk assembly detection Electricity 4 Active
US11361981B2 Batch substrate support with warped substrate capability Electricity 4 Active
USD931241S1 Lower shield for a substrate processing chamber General 3 Active
USD973609S1 Upper shield with showerhead for a process chamber General 3 Active
US9548200B2 Variable frequency microwave (VFM) processes and applications in semiconductor thin film fabrications Electricity 2 Active
USD967081S1 Microwave transmission window assembly General 2 Active
US11251028B2 Pre-clean chamber with integrated shutter garage Electricity 2 Active
US10629430B2 Variable frequency microwave (VFM) processes and applications in semiconductor thin film fabrications Electricity 2 Active
US11043406B2 Two piece shutter disk assembly with self-centering feature Electricity 1 Active
US10945313B2 Methods and apparatus for a microwave batch curing process Electricity 1 Active
US9960035B2 Variable frequency microwave (VFM) processes and applications in semiconductor thin film fabrications Electricity 1 Active
US10373860B2 Batch processing apparatus Electricity 1 Active
US11375584B2 Methods and apparatus for processing a substrate using microwave energy Electricity 0 Active
US12080522B2 Preclean chamber upper shield with showerhead Electricity 0 Active
US11630001B2 Apparatus for measuring temperature in a vacuum and microwave environment Physics 0 Active
US11699634B2 Water cooled plate for heat management in power amplifiers Electricity 0 Active
US11784075B2 Batch substrate support with warped substrate capability Electricity 0 Active
US10971383B2 Fluorescence based thermometry for packaging applications Electricity 0 Active
US11362404B2 Microwave window including first and second plates with vertical stepped areas configured for pressure sealing a dielectric plate between the first and second plates Electricity 0 Active
US11670525B2 Methods and apparatus for microwave leakage reduction for semiconductor process chambers Electricity 0 Active
US12100577B2 High conductance inner shield for process chamber Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.