Alignment module with a cleaning chamber

US11637004B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Alexander Lerner · Carmiel, IL
• Michael P. Karazim · San Jose, US
• Andrew J. Constant · Cupertino, US
• Jeffrey A. Brodine · Los Gatos, US
• Kim Vellore · San Jose, US
• Kevin Moraes · Fremont, US
• Roey Shaviv · Palo Alto, US

Key dates

• Filing date: Apr 14, 2020
• Grant date: Apr 25, 2023
• Expiry date: Mar 9, 2041

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/682
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

An alignment module for housing and cleaning masks. The alignment module comprises a mask stocker, a cleaning chamber, an alignment chamber, an alignment stage a transfer robot. The mask stocker is configured to house a mask cassette configured to store a plurality of masks. The cleaning chamber is configured to clean the plurality of masks by providing one or more cleaning gases into a chamber after a mask is inserted into the cleaning chamber. The alignment stage is configured to support a carrier and a substrate. The transfer robot is configured to transfer a mask from one or more of the alignment stage and the mask stocker to the cleaning chamber.