Systems and methods for spin process video analysis during substrate processing

US11637031B2 · kind B2 · utility

Assignee

• TOKYO ELECTRON LIMITED · JP

Inventors

• Michael A. Carcasi · Austin, US
• Joshua Hooge · Austin, US
• Mark H. Somervell · Richardson, US
• Hiroyuki Iwaki · Osaka, JP
• Masahide Tadokoro · Kumamoto, JP
• Masashi Enomoto · Kumamoto, JP
• Joel Estrella · Austin, US
• Yuichiro KUNUGIMOTO · Kochi, JP

Key dates

• Filing date: Sep 29, 2020
• Grant date: Apr 25, 2023
• Expiry date: Apr 10, 2041

Classification

• Technology area (CPC G): Physics
• CPC primary: G06T2207/30148
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Camera images may be utilized to detect substrate edges and provide information regarding the centering of the substrate within the fluid dispense system. Camera images may also be utilized to monitoring the location of a cup within the fluid dispense system. The signal processing techniques utilized may include data smoothing, analyzing only certain wavelengths of reflected energy, transforming the data (in one embodiment utilizing a Fourier transform), and/or analyzing a sub-set of the collected pixels of data. The camera image data collected herein may be combined with a wide variety of other data so as to better monitor, characterize and/or control a substrate processing process flow.