Charged particle beam device
US11640897B2 · kind B2 · utility
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1References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 4, 2017 |
| Grant date | May 2, 2023 |
| Priority date | — |
| Expiry date | Mar 19, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/31749
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The present invention provides a charged particle beam apparatus capable of efficiently reducing the effect of a residual magnetic field when SEM observation is performed. The charged particle beam apparatus according to the present invention includes a first mode for passing a direct current to a second coil after turning off a first coil, and a second mode for passing an alternating current to the second coil after turning off the first coil.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.