Method of forming structures using a neutral beam
US11643724B2 · kind B2 · utility
1Cited by
2,213References
17Claims
0Family size
Assignee
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Key dates
| Filing date | Jul 15, 2020 |
| Grant date | May 9, 2023 |
| Priority date | — |
| Expiry date | Jul 15, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H3/02
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Methods of forming structures using a neutral beam, structures formed using a neutral beam, and reactor systems for forming the structures are disclosed. The neutral beam can be used to provide activated species during deposition of a layer and/or to provide activated species to treat a deposited layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.