Patent · US Active

Method for germanium enrichment around the channel of a transistor

US11646196B2 · kind B2 · utility

0Cited by
0References
8Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 24, 2021
Grant dateMay 9, 2023
Priority date
Expiry dateNov 25, 2041

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D64/018
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

Making of a transistor structure comprising in this order:

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.