Pad conditioner cleaning system
US11648645B2 · kind B2 · utility
1Cited by
8References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 24, 2022 |
| Grant date | May 16, 2023 |
| Priority date | — |
| Expiry date | Jun 24, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67046
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A method of cleaning a conditioner head includes bringing two clamps of a cleaning tool inward toward a disk-shaped pad conditioner head to press a sponge against an outer surface of the disk-shaped pad conditioner head, and creating relative motion between the cleaning tool and the pad conditioner head to wipe the sponge against the pad conditioner head.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.