SNSPD with integrated aluminum nitride seed or waveguide layer
US11653576B2 · kind B2 · utility
1Cited by
8References
13Claims
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Key dates
| Filing date | Jan 29, 2021 |
| Grant date | May 16, 2023 |
| Priority date | — |
| Expiry date | Jan 29, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N60/0241
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A superconducting nanowire single photon detector (SNSPD) device includes a substrate having a top surface, an optical waveguide on the top surface of the substrate to receive light propagating substantially parallel to the top surface of the substrate, a seed layer of metal nitride on the optical waveguide, and a superconductive wire on the seed layer. The superconductive wire is a metal nitride different from the metal nitride of the seed layer and is optically coupled to the optical waveguide.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.