Substrate transport
US11658051B2 · kind B2 · utility
0Cited by
19References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 14, 2021 |
| Grant date | May 23, 2023 |
| Priority date | — |
| Expiry date | Nov 12, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67775
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A substrate transport system includes a carrier having a housing forming an interior environment having an opening for holding at least one substrate and a door for sealing the opening from an outside atmosphere where when sealed the interior environment is configured to maintain an interior atmosphere therein, the housing including a fluid reservoir exterior to the interior environment and configured to contain a fluid, forming a different atmosphere in the fluid reservoir than the interior atmosphere, to form a fluidic barrier seal that seals the interior environment from an environment exterior to the carrier.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.