Particle density sensor using evanescent wave of waveguide

US11668636B2 · kind B2 · utility

Assignees

• AMS AG · AT
• Technische Universität Wien · AT

Inventors

• Jochen Kraft · Bruck an der Mur, AT
• Georg Röhrer · Graz, AT
• Fernando Jesus CASTANO SANCHEZ · Premstätten, AT
• Anderson PIRES SINGULANI · Eindhoven, NL
• Paul Maierhofer · Premstätten, AT

Key dates

• Filing date: Dec 13, 2018
• Grant date: Jun 6, 2023
• Expiry date: Dec 13, 2038

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N2015/03
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The particle sensor device comprises a substrate, a photodetector, a dielectric on or above the substrate, a source of electromagnetic radiation, and a through-substrate via in the substrate. The through-substrate via is exposed to the environment, in particular to ambient air. A waveguide is arranged in or above the dielectric so that the electromagnetic radiation emitted by the source of electromagnetic radiation is coupled into a portion of the waveguide. A further portion of the waveguide is opposite the photodetector, so that said portions of the waveguide are on different sides of the through-substrate via, and the waveguide traverses the through-substrate via.