Roll-to-roll programmable film imprint lithography

US11669009B2 · kind B2 · utility

Assignee

• The Board of Regents of the University of Texas System · US

Inventors

• Sidlgata V. Sreenivasan · Austin, US
• Shrawan Singhal · Austin, US
• Ovadia Abed · Austin, US
• Lawrence R. Dunn · Austin, US
• Paras Ajay · Austin, US
• Ofodike A. Ezekoye · Austin, US

Key dates

• Filing date: Aug 3, 2017
• Grant date: Jun 6, 2023
• Expiry date: Jun 9, 2040

Classification

• Technology area (CPC G): Physics
• CPC primary: G01Q60/24
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A method for fabricating patterns on a flexible substrate in a roll-to-roll configuration. Drops of a monomer diluted in a solvent are dispensed on a substrate, where the drops spontaneously spread and merge with one another to form a liquid resist formulation. The solvent is evaporated (e.g., blanket evaporation) from the liquid resist formulation followed by selective multi-component resist film evaporation resulting in a non-uniform and substantially continuous film on the substrate. The gap between the film on the substrate and a template is closed such that the film fills the features of the template. After cross-linking the film to polymerize the film, the template is separated from the substrate thereby leaving the polymerized film on the substrate.