Methods and apparatus for microwave leakage reduction for semiconductor process chambers
US11670525B2 · kind B2 · utility
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3References
18Claims
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Key dates
| Filing date | Mar 25, 2019 |
| Grant date | Jun 6, 2023 |
| Priority date | — |
| Expiry date | Oct 17, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05B6/76
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Methods and apparatus for reducing leakage of microwaves at a slit valve of a process chamber. A multi-frequency resonant choke around the slit valve prevents microwave energy from a band of frequencies from escaping from the slit valve. The multi-frequency resonant choke may have a sloping bottom surface or a serrated bottom surface to enable multiple frequencies to resonant in the choke, canceling a range of microwave frequencies at gaps formed by a slit valve gate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.