Glass carrier cleaning using ozone
US11673830B2 · kind B2 · utility
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11Claims
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Key dates
| Filing date | Nov 11, 2020 |
| Grant date | Jun 13, 2023 |
| Priority date | — |
| Expiry date | Apr 17, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67346
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
In a method for removing an organic adhesive from a glass carrier in a semiconductor manufacturing process, the glass carrier is placed into a process chamber. The glass carrier is rotated and heated sulfuric acid is applied or sprayed onto the glass carrier. Ozone is introduced into the process chamber. The ozone diffuses through the sulfuric acid to the organic adhesive on the surface of the glass carrier. The sulfuric acid and the ozone chemically react with the organic adhesive and remove it from the glass carrier.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.