Reflectometer, spectrophotometer, ellipsometer and polarimeter system with a super continuum laser source of a beam of electromagnetism, and improved detector system

US11675208B1 · kind B1 · utility

Assignee

• J.A. WOOLLAM CO., INC. · US

Inventors

• Stefan Schoeche · Lincoln, US
• Martin M. Liphardt · Lincoln, US
• Ping He · Lincoln, US
• Jeremy A. Van Derslice · Lincoln, US
• Craig M. Herzinger · Lincoln, US
• Jeffrey S. Hale · Lincoln, US
• Brian D. Guenther · Lincoln, US
• Duane E. Meyer · Lincoln, US
• John A. Woollam · Lincoln, US
• James D. Welch · Omaha, US

Key dates

• Filing date: Mar 5, 2021
• Grant date: Jun 13, 2023
• Expiry date: Sep 22, 2041

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N2021/213
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Reflectometer, spectrophotometer, ellipsometer, and polarimeter systems having a supercontinuum laser source of coherent electromagnetic radiation over a range of between 400 nm to between 4400 nm and 18000 nm, and another source of wavelengths to provide between 400 nm and as high as at least 50000 nm; a stage for supporting a sample and a detector of electromagnetic radiation, wherein the source provides a beam of electromagnetic radiation which interacts with a sample and enters a detector system optionally incorporating a wavelength modifier, where the detector system can be functionally incorporated with combinations of gratings and/or combination dichroic beam splitter-prisms, which can be optimized as regards wavelength dispersion characteristics to direct wavelengths in various ranges to various detectors that are well suited to detect them.