Electronic devices including stair step structures, and related memory devices, systems, and methods
US11688689B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 6, 2021 |
| Grant date | Jun 27, 2023 |
| Priority date | — |
| Expiry date | Sep 29, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10B43/27
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An electronic device comprises a stack structure comprising tiers of alternating conductive structures and insulative structures, staircase structures within the stack structure and including steps defined by edges of the tiers, contacts on the steps of the staircase structures, support pillars extending vertically through the stack structure, and support structures laterally adjacent to the contacts in a first horizontal direction and extending vertically through the stack structure. The support pillars exhibit a lateral dimension relatively larger than a lateral dimension of the contacts and the support structures. Related methods, memory devices, and systems are also described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.