Laminated anodic aluminum oxide structure, guide plate of probe card using same, and probe card having same
US11691387B2 · kind B2 · utility
1Cited by
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7Claims
0Family size
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Key dates
| Filing date | Apr 15, 2021 |
| Grant date | Jul 4, 2023 |
| Priority date | — |
| Expiry date | Sep 16, 2041 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC04B2237/62
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Proposed are a laminated anodic aluminum oxide structure in which a plurality of anodic aluminum oxide films are stacked, a guide plate of a probe card using the same, and a probe card having the same. More particularly, proposed are a laminated anodic aluminum oxide structure with a high degree of surface strength, a guide plate of a probe card using the same, and a probe card having the same.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.