EM source for enhanced plasma control
US11692262B2 · kind B2 · utility
0Cited by
2References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 16, 2020 |
| Grant date | Jul 4, 2023 |
| Priority date | — |
| Expiry date | Aug 8, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/3461
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Apparatus and methods for controlling plasma profiles during PVD deposition processes are disclosed. Some embodiments utilize EM coils placed above the target to control the plasma profile during deposition.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.