Inventor · San Jose, CA, US

Prashanth Kothnur

25Patents
2h-index
69Co-inventors
56Inventor score

Filing activity: Apr 3, 2008 → Dec 1, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US9591738B2 Plasma generator systems and methods of forming plasma Electricity 15 Active
US9831074B2 Bipolar collimator utilized in a physical vapor deposition chamber Electricity 3 Active
US9991101B2 Magnetron assembly for physical vapor deposition chamber Electricity 2 Active
US9928997B2 Apparatus for PVD dielectric deposition Electricity 1 Active
US11970775B2 Showerhead for providing multiple materials to a process chamber Chemistry; Metallurgy 1 Active
US9620339B2 Sputter source for semiconductor process chambers Electricity 1 Active
US11393703B2 Apparatus and method for controlling a flow process material to a deposition chamber Electricity 1 Active
US11600476B2 Deposition system with multi-cathode and method of manufacture thereof Electricity 0 Active
US11692262B2 EM source for enhanced plasma control Electricity 0 Active
US11183375B2 Deposition system with multi-cathode and method of manufacture thereof Electricity 0 Active
US12325909B2 EM source for enhanced plasma control Electricity 0 Active
US9520267B2 Bias voltage frequency controlled angular ion distribution in plasma processing Electricity 0 Active
US11505863B2 Methods for forming films on substrates Chemistry; Metallurgy 0 Active
US11495440B2 Plasma density control on substrate edge Electricity 0 Active
US12131105B2 Virtual measurement of conditions proximate to a substrate with physics-informed compressed sensing Physics 0 Active
US12203163B2 Methods for shaping magnetic fields during semiconductor processing Electricity 0 Active
US11834743B2 Segmented showerhead for uniform delivery of multiple precursors Chemistry; Metallurgy 0 Active
US11655534B2 Apparatus for reducing tungsten resistivity Electricity 0 Active
US12043895B2 Methods of using a segmented showerhead for uniform delivery of multiple pre-cursors Chemistry; Metallurgy 0 Active
US11170982B2 Methods and apparatus for producing low angle depositions Electricity 0 Active
US10790121B2 Plasma density control on substrate edge Electricity 0 Active
US11447857B2 Methods and apparatus for reducing tungsten resistivity Electricity 0 Active
US12001197B2 Eco-efficiency (sustainability) dashboard for semiconductor manufacturing Electricity 0 Active
USD967351S1 Showerhead reflector General 0 Active
USD969980S1 Deposition chamber showerhead General 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.