Anodic aluminum oxide structure, probe head having same, and probe card having same
US11696398B2 · kind B2 · utility
1Cited by
0References
6Claims
0Family size
Assignee
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Key dates
| Filing date | Mar 22, 2021 |
| Grant date | Jul 4, 2023 |
| Priority date | — |
| Expiry date | Sep 8, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05K2201/09618
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Proposed are an anodic aluminum oxide structure made of anodic aluminum oxide, a probe head having the same, and a probe card having the same. More particularly, proposed are an anodic aluminum oxide structure that has a fine size and pitch guide hole and facilitates insertion of a probe, a probe head having the same, and a probe card having the same.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.