Seal retainer for a component assembly and method of installing a component into an apparatus for controlling flow
US11698134B2 · kind B2 · utility
0Cited by
2References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 12, 2021 |
| Grant date | Jul 11, 2023 |
| Priority date | — |
| Expiry date | Aug 21, 2041 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S277/917
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
Apparatuses for controlling fluid flow are important components for delivering process fluids for semiconductor fabrication. These apparatuses for controlling fluid flow require a variety of fluid flow components which are tightly packaged within the apparatuses for controlling flow. Servicing the apparatuses requires specialized equipment and methods which enable installation of seals in close quarters in apparatuses which are installed in the field. Seal retainers may be used to retain the seals during assembly of fluid flow components into apparatus for controlling flow.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.