Randolph Treur
21Patents
6h-index
16Co-inventors
66Inventor score
Filing activity: Jun 11, 1999 → Nov 21, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6146242A | Optical view port for chemical mechanical planarization endpoint detection | Performing Operations; Transporting | 67 | Expired |
| US6578853B1 | Chuck assembly for use in a spin, rinse, and dry module and methods for making and implementing the same | Emerging Cross-Sectional Technologies | 40 | Expired |
| US6488568B1 | Optical view port for chemical mechanical planarization endpoint detection | Performing Operations; Transporting | 18 | Expired |
| US7087122B2 | Wafer backside plate for use in a spin, rinse, and dry module and methods for making and implementing the same | Electricity | 14 | Expired |
| US6827092B1 | Wafer backside plate for use in a spin, rinse, and dry module and methods for making and implementing the same | Electricity | 12 | Expired |
| US6866051B1 | Megasonic substrate processing module | Emerging Cross-Sectional Technologies | 9 | Expired |
| US6848194B2 | Apparatus for monitoring a semiconductor wafer during a spin drying operation | Emerging Cross-Sectional Technologies | 6 | Expired |
| US7170190B1 | Apparatus for oscillating a head and methods for implementing the same | Human Necessities | 5 | Expired |
| US7040332B2 | Method and apparatus for megasonic cleaning with reflected acoustic waves | Emerging Cross-Sectional Technologies | 5 | Expired |
| US11158522B2 | Fluid delivery system | Emerging Cross-Sectional Technologies | 4 | Active |
| US6558964B2 | Method and apparatus for monitoring a semiconductor wafer during a spin drying operation | Emerging Cross-Sectional Technologies | 4 | Expired |
| US6748961B2 | Angular spin, rinse, and dry module and methods for making and implementing the same | Emerging Cross-Sectional Technologies | 3 | Expired |
| US11158521B2 | Liquid delivery system | Emerging Cross-Sectional Technologies | 1 | Active |
| US6481447B1 | Fluid delivery ring and methods for making and implementing the same | Emerging Cross-Sectional Technologies | 1 | Expired |
| US7040017B2 | Methods for making and implementing fluid delivery ring | Emerging Cross-Sectional Technologies | 0 | Expired |
| US7029539B2 | Angular spin, rinse, and dry module and methods for making and implementing the same | Emerging Cross-Sectional Technologies | 0 | Expired |
| US11698134B2 | Seal retainer for a component assembly and method of installing a component into an apparatus for controlling flow | Emerging Cross-Sectional Technologies | 0 | Active |
| US11990354B2 | Method of manufacturing semiconductors using fluid delivery system | Emerging Cross-Sectional Technologies | 0 | Active |
| US12062553B2 | Method of manufacturing semiconductors using fluid delivery system | Emerging Cross-Sectional Technologies | 0 | Active |
| US12183597B2 | Fluid delivery system | Emerging Cross-Sectional Technologies | 0 | Active |
| US7494550B2 | Fluid delivery ring and methods for making and implementing the same | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.