Segmented multi-channel, backside illuminated, solid state detector with a through-hole for detecting secondary and backscattered electrons
US11699607B2 · kind B2 · utility
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4References
20Claims
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Key dates
| Filing date | Sep 23, 2021 |
| Grant date | Jul 11, 2023 |
| Priority date | — |
| Expiry date | Sep 23, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/24465
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A segmented detector device with backside illumination. The detector is able to collect and differentiate between secondary electrons and backscatter electrons. The detector includes a through-hole for passage of a primary electron beam. After hitting a sample, the reflected secondary and backscatter electrons are collected via a vertical structure having a P+/P−/N+ or an N+/N−/P+ composition for full depletion through the thickness of the device. The active area of the device is segmented using field isolation insulators located on the front side of the device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.