Processing chamber condition and process state monitoring using optical reflector attached to processing chamber liner
US11708635B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 12, 2020 |
| Grant date | Jul 25, 2023 |
| Priority date | — |
| Expiry date | Apr 22, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/8427
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system includes a reflector attached to a liner of a processing chamber. A light coupling device is to transmit light, from a light source, through a window of the processing chamber directed at the reflector. The light coupling device focuses, into a spectrometer, light received reflected back from the reflector along an optical path through the processing chamber and the window. The spectrometer detects, within the focused light, a first spectrum representative of a deposited film layer on the reflector using reflectometry. An alignment device aligns, in two dimensions, the light coupling device with the reflector until maximization of the focused light received by the light coupling device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.