Process fluid path switching in recipe operations

US11714430B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Mitesh Sanghvi · Sunnyvale, US
• Venkatanarayana Shankaramurthy · San Jose, US
• Peter Standish · San Jose, US
• Anton Baryshnikov · Santa Clara, US
• Thorsten Kril · Santa Clara, US
• Chahal Neema · Santa Clara, US
• Vishal Suresh Jamakhandi · Bengaluru, IN
• Abhijit A. Kangude · San Jose, US

Key dates

• Filing date: Sep 29, 2022
• Grant date: Aug 1, 2023
• Expiry date: Sep 29, 2042

Classification

• Technology area (CPC G): Physics
• CPC primary: G05B2219/25257
• WIPO field: Control
• WIPO sector: Instruments

Abstract

A method includes identifying time values for a length of time to carry out process fluid delivery within multiple processing chambers that concurrently process multiple substrates; translating each time value to a recipe parameter for execution of an operation of a processing recipe; and causing the operation to be performed using each recipe parameter as a control value to control valves of a fluid panel of the multiple processing chambers. For each processing chamber of the multiple processing chambers, selectively controlling process fluid flow to the process chamber for a first period of time corresponding to a time value of the set of time values and to a divert foreline of the process chamber for a second period of time.