Integrated super-resolution laser direct-writing device and direct-writing method

US11726407B2 · kind B2 · utility

Assignee

• Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences · CN

Inventors

• Aijun Zeng · Shanghai, CN
• Tiecheng Liu · Shanghai, CN
• Jingpei Hu · Shanghai, CN
• Linglin Zhu · Shanghai, CN
• Huijie Huang · Shanghai, CN

Key dates

• Filing date: Dec 17, 2018
• Grant date: Aug 15, 2023
• Expiry date: Sep 16, 2039

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/70383
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

Provided are an integrated super-resolution laser direct-writing device and a direct-writing method. The integrated super-resolution laser direct-writing device includes a first continuous laser, a first optical fiber coupler, a mono-mode optical fiber, a second continuous laser, a second optical fiber coupler, a first annular photonic crystal fiber, a bifurcated optical fiber, a lens group, a first dichroic mirror, an LED light source, a lens, a second dichroic mirror, an auto-focusing module, a third dichroic mirror, a third optical fiber coupler, a square-law graded index fiber, a nanometer displacement table, a second lens, a CMOS camera and a control system. According to the present invention, an original large direct-writing device based on a free optical path can achieve optical fibers of key devices and integration of systems and can be better applied to the field of laser direct-writing.