Aijun Zeng
7Patents
1h-index
18Co-inventors
40Inventor score
Filing activity: Jun 28, 2011 → Dec 17, 2018
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9297744B2 | Device and method for measuring phase retardation distribution and fast axis azimuth angle distribution in real time | Physics | 2 | Active |
| US9121788B2 | Device and method for detecting optical performance of beam shaping element | Physics | 1 | Active |
| US9323052B2 | Lithography pupil shaping optical system and method for generating off-axis illumination mode | Physics | 0 | Active |
| US9804502B2 | Illumination device and method for using the same in the projection lithography machine | Physics | 0 | Active |
| US9400433B2 | Lithography illumination system | Physics | 0 | Active |
| US11726407B2 | Integrated super-resolution laser direct-writing device and direct-writing method | Physics | 0 | Active |
| US9709896B2 | Illumination system for lithographic projection exposure step-and-scan apparatus | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.