Patent · US Active

Method of recording an image using a particle microscope

US11728130B2 · kind B2 · utility

0Cited by

4References

26Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Dirk Zeidler · Oberkochen, DE
Thomas Korb · Schwäbisch Gmünd, DE
Philipp Huethwohl · Ulm, DE
Jens Timo Neumann · Shanghai, CN
Christof Riedesel · Oberkochen, DE
Christian Wojek · Aalen, DE
Joaquin Correa · Oakland, US
Wolfgang Hoegele · Rosenheim, DE

Key dates

Filing date	Apr 1, 2021
Grant date	Aug 15, 2023
Priority date	—
Expiry date	Apr 13, 2041

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/2806
WIPO fieldComputer technology
WIPO sectorElectrical engineering

Abstract

A method, including: recording plural images of an object by scanning plural particle beams across the object and detecting signals generated by the particle beams, wherein the plural particle beams are generated by a multi-beam particle microscope; determining plural regions of interest; determining plural image regions in each of the recorded images; determining plural displacement vectors; and determining image distortions based on image data of the recorded images and the determined displacement vectors.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.