Bath systems and methods thereof
US11738363B2 · kind B2 · utility
0Cited by
36References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 7, 2021 |
| Grant date | Aug 29, 2023 |
| Priority date | — |
| Expiry date | Jun 7, 2041 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB05D1/18
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method of processing a plurality of substrates includes immersing the plurality of substrates into a bath solution contained in a bath chamber; generating gas bubbles in the bath solution; projecting light from a light source toward the bath chamber; generating light sensor data by capturing light emanating off the bath chamber after interacting with the gas bubbles with a light sensor; and converting the light sensor data into a metric for the bath solution.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.