Clean isolation valve for reduced dead volume
US11746417B2 · kind B2 · utility
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26References
11Claims
0Family size
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Key dates
| Filing date | Sep 20, 2022 |
| Grant date | Sep 5, 2023 |
| Priority date | — |
| Expiry date | Sep 20, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/3244
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Gas distribution apparatus, processing chambers and methods using a dead volume-free valve are described. The valve has a first inlet line with upstream and downstream ends and a second inlet line with a downstream end that connects to the first inlet line. A sealing surface at the downstream end of the second inlet line separates the first inlet line from the second inlet line preventing fluid communication between the first inlet line and the second inlet line.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.