Patent · US Active

Scanning electron microscope

US11756763B2 · kind B2 · utility

0Cited by

6References

13Claims

0Family size

Assignee

HITACHI HIGH-TECH CORPORATION · JP

Inventors

Teruo Kohashi · Tokyo, JP
Hideo Morishita · Tokyo, JP
Junichi Katane · Tokyo, JP

Key dates

Filing date	Jun 6, 2019
Grant date	Sep 12, 2023
Priority date	—
Expiry date	Sep 4, 2039

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/2813
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A scanning electron microscope includes a spin detector configured to measure secondary electron spin polarization of secondary electrons emitted from the sample, and an analysis device configured to analyze secondary electron spin polarization data measured by the spin detector. The analysis device evaluates the strain in the sample by calculating a difference in the secondary electron spin polarization data of adjacent pixels.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.