Sensor apparatus for lithographic measurements
US11761929B2 · kind B2 · utility
0Cited by
10References
19Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 29, 2019 |
| Grant date | Sep 19, 2023 |
| Priority date | — |
| Expiry date | Aug 3, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/2697
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensor apparatus comprising an acoustic assembly arranged to transmit an acoustic signal to a substrate and receive at least part of the acoustic signal after the acoustic signal has interacted with the substrate, a transducer arranged to convert the at least part of the acoustic signal to an electronic signal, and, a processor configured to receive the electronic signal and determine both a topography of at least part of the substrate and a position of a target of the substrate based on the electronic signal. The sensor apparatus may for part of a lithographic apparatus or a metrology apparatus.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.