System and method for analyzing a sample with a dynamic recipe based on iterative experimentation and feedback
US11761969B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 21, 2020 |
| Grant date | Sep 19, 2023 |
| Priority date | — |
| Expiry date | Jan 21, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2035/0094
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system for analyzing one or more samples includes a sample analysis sub-system configured to perform one or more measurements on the one or more samples. The system further includes a controller configured to: receive design of experiment (DoE) data for performing the one or more measurements on the one or more samples; determine rankings for a set of target parameters; generate a recipe for performing the one or more measurements on the one or more samples based on the DoE data and the rankings of the set of target parameters; determine run parameters based on the recipe; perform the one or more measurements on the one or more samples, via the sample analysis sub-system, according to the recipe; and adjust the run parameters based on output data associated with performing the one or more measurements on the one or more samples.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.