Anna Golotsvan
13Patents
2h-index
36Co-inventors
43Inventor score
Filing activity: May 19, 2019 → Feb 27, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11353799B1 | System and method for error reduction for metrology measurements | Electricity | 3 | Active |
| US11761969B2 | System and method for analyzing a sample with a dynamic recipe based on iterative experimentation and feedback | Physics | 3 | Active |
| US12001148B2 | Enhancing performance of overlay metrology | Electricity | 1 | Active |
| US11726410B2 | Multi-resolution overlay metrology targets | Electricity | 1 | Active |
| US11592755B2 | Enhancing performance of overlay metrology | Electricity | 1 | Active |
| US11809090B2 | Composite overlay metrology target | Physics | 0 | Active |
| US11615974B2 | Fab management with dynamic sampling plans, optimized wafer measurement paths and optimized wafer transport, using quantum computing | Emerging Cross-Sectional Technologies | 0 | Active |
| US11353493B2 | Data-driven misregistration parameter configuration and measurement system and method | Electricity | 0 | Active |
| US12013634B2 | Reduction or elimination of pattern placement error in metrology measurements | Physics | 0 | Active |
| US11537043B2 | Reduction or elimination of pattern placement error in metrology measurements | Physics | 0 | Active |
| US12222199B2 | Systems and methods for measurement of misregistration and amelioration thereof | Electricity | 0 | Active |
| US11862521B2 | Multiple-tool parameter set calibration and misregistration measurement system and method | Electricity | 0 | Active |
| US11551980B2 | Dynamic amelioration of misregistration measurement | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.