Chamber component with protective ceramic coating containing yttrium, aluminum and oxygen
US11769683B2 · kind B2 · utility
1Cited by
61References
20Claims
0Family size
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Key dates
| Filing date | Apr 25, 2022 |
| Grant date | Sep 26, 2023 |
| Priority date | — |
| Expiry date | Apr 25, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02N13/00
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A coated chamber component comprises a body and a protective ceramic coating deposited over a surface of the body, the protective ceramic coating being amorphous and comprising about 8-20% by weight yttrium, about 20-32% by weight aluminum, and about 60-70% by weight oxygen.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.