Generating electric power for a robotic end effector

US11770049B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Alexander Berger · Palo Alto, US
• Paul Lawrence Korff · Sunnyvale, US
• William P. Laceky · Georgetown, US
• Jeffrey C. Hudgens · San Francisco, US
• Rajkumar Thanu · Santa Clara, US
• Damon K. Cox · Round Rock, US
• Matvey Farber · Redwood City, US

Key dates

• Filing date: Sep 23, 2020
• Grant date: Sep 26, 2023
• Expiry date: Sep 12, 2041

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B25J19/005
• WIPO field: Handling
• WIPO sector: Mechanical engineering

Abstract

A robot device includes a first link and a second link coupled to the first link via an elbow. One or more of the first link or the second link rotates about an axis of the elbow. The robot device further includes a generator disposed in the elbow. The generator is configured to generate electrical power based on relative angular mechanical movement associated with the elbow. The robot device further includes an end effector configured to transport a substrate within a substrate processing system. The end effector is disposed at a distal end of the second link. The end effector is to receive the electrical power generated by the generator.