Solid source sublimator

US11773486B2 · kind B2 · utility

Assignee

• ASM IP Holding B.V. · NL

Inventors

• Eric James Shero · Phoenix, US
• Carl Louis White · Gilbert, US
• Mohith Verghese · Phoenix, US
• Kyle Fondurulia · Phoenix, US
• Timothy J. Sullivan · Brisbane, AU

Key dates

• Filing date: Feb 1, 2023
• Grant date: Oct 3, 2023
• Expiry date: Feb 1, 2043

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/67115
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

Herein disclosed are systems and methods related to solid source chemical sublimator vessels and corresponding deposition modules. The solid source chemical sublimator can include a housing configured to hold solid chemical reactant therein. A lid may be disposed on a proximal portion of the housing. The lid can include a fluid inlet and a fluid outlet and define a serpentine flow path within a distal portion of the lid. The lid can be adapted to allow gas flow within the flow path. The solid source chemical sublimator can include a filter that is disposed between the serpentine flow path and the distal portion of the housing. The filter can have a porosity configured to restrict a passage of a solid chemical reactant therethrough.