Inventor · Phoenix, AZ, US

Eric James Shero

123Patents
30h-index
104Co-inventors
93Inventor score

Filing activity: Oct 31, 1991 → Oct 12, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US9017481B1 Process feed management for semiconductor substrate processing Electricity 716 Active
US7122085B2 Sublimation bed employing carrier gas guidance structures Chemistry; Metallurgy 563 Expired
US8137462B2 Precursor delivery system Chemistry; Metallurgy 546 Active
US7601225B2 System for controlling the sublimation of reactants Chemistry; Metallurgy 541 Expired
USD614153S1 Reactant source vessel General 538 Expired
US8216380B2 Gap maintenance for opening to process chamber Electricity 538 Active
US8309173B2 System for controlling the sublimation of reactants Chemistry; Metallurgy 536 Active
US7851019B2 Method for controlling the sublimation of reactants Chemistry; Metallurgy 532 Active
US8287648B2 Method and apparatus for minimizing contamination in semiconductor processing chamber Electricity 530 Active
US9005539B2 Chamber sealing member Electricity 529 Active
US8877655B2 Systems and methods for thin-film deposition of metal oxides using excited nitrogen-oxygen species Electricity 529 Active
US8986456B2 Precursor delivery system Chemistry; Metallurgy 528 Active
US8883270B2 Systems and methods for thin-film deposition of metal oxides using excited nitrogen—oxygen species Chemistry; Metallurgy 527 Active
US8841182B1 Silane and borane treatments for titanium carbide films Electricity 513 Active
US9202727B2 Susceptor heater shim Electricity 506 Active
US9228259B2 Method for treatment of deposition reactor Electricity 497 Active
US9394608B2 Semiconductor processing reactor and components thereof Emerging Cross-Sectional Technologies 487 Active
US9574268B1 Pulsed valve manifold for atomic layer deposition Electricity 471 Active
US9892908B2 Process feed management for semiconductor substrate processing Electricity 456 Active
US10087522B2 Deposition of metal borides Chemistry; Metallurgy 447 Active
US7795160B2 ALD of metal silicate films Electricity 396 Active
US10276355B2 Multi-zone reactor, system including the reactor, and method of using the same Electricity 396 Active
US6613695B2 Surface preparation prior to deposition Electricity 220 Expired
US7118779B2 Reactor surface passivation through chemical deactivation Performing Operations; Transporting 132 Expired
US7914847B2 Reactor surface passivation through chemical deactivation Chemistry; Metallurgy 98 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.