Method of and apparatus for extending electrode life in a laser chamber
US11777271B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 9, 2018 |
| Grant date | Oct 3, 2023 |
| Priority date | — |
| Expiry date | Mar 12, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/225
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Disclosed are methods of and apparatus for extending a useful lifetime of a laser discharge chamber in which a polarity of an electrode positioned at a fixed position within the chamber is caused to be positive with respect to the polarity of a second electrode defining a discharge gap with the first electrode and the first electrode is made of a material that forms an erosion resistant surface when the first electrode is used and an anode. Also disclosed is an arrangement in which a first electrode is positionable with respect a second electrode defining a discharge gap with the second electrode and the position of the first electrode controlled to maintain the width of the gap within a predetermined range.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.