SNSPD with integrated aluminum nitride seed or waveguide layer
US11788883B2 · kind B2 · utility
1Cited by
9References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 29, 2021 |
| Grant date | Oct 17, 2023 |
| Priority date | — |
| Expiry date | Jul 31, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N60/0241
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A superconducting nanowire single photon detector (SNSPD) device includes a substrate, a distributed Bragg reflector on the substrate, a seed layer of a metal nitride on the distributed Bragg reflector, and a superconductive wire on the seed layer. The distributed Bragg reflector includes a plurality of bi-layers, each bi-layer including lower layer of a first material and an upper layer of a second material having a higher index of refraction than the first material. The wire is a metal nitride different from the metal nitride of the seed material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.