Patent · US Active

Method for producing polyimide precursor, method for producing photosensitive resin composition, method for producing pattern cured product, method for producing interlayer insulating film, cover coat layer or surface protective film, and method for producing electronic component

US11807721B2 · kind B2 · utility

0Cited by
3References
8Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 3, 2018
Grant dateNov 7, 2023
Priority date
Expiry dateFeb 9, 2039

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG03F7/40
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A method for producing a polyimide precursor having a structural unit represented by the following formula (1),

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.