Method for producing polyimide precursor, method for producing photosensitive resin composition, method for producing pattern cured product, method for producing interlayer insulating film, cover coat layer or surface protective film, and method for producing electronic component
US11807721B2 · kind B2 · utility
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3References
8Claims
0Family size
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Key dates
| Filing date | Apr 3, 2018 |
| Grant date | Nov 7, 2023 |
| Priority date | — |
| Expiry date | Feb 9, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/40
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method for producing a polyimide precursor having a structural unit represented by the following formula (1),
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.