Protection of aluminum process chamber components

US11810766B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Karthikeyan Balaraman · Kanchinakote, IN
• Sathyanarayana Bindiganavale · Bengaluru, IN
• Rajasekhar PATIBANDLA · Kanchinakote, IN
• Balamurugan Ramasamy · Kanchinakote, IN
• Kartik Shah · Saratoga, US
• Umesh M. Kelkar · Santa Clara, US
• Mats Larsson · Kalmar, SE
• Kevin A. PAPKE · Portland, US
• William M. Lu · Sunnyvale, US

Key dates

• Filing date: May 2, 2019
• Grant date: Nov 7, 2023
• Expiry date: Jan 7, 2040

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/68757
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

Embodiments of the present disclosure are directed towards a protective multilayer coating for process chamber components exposed to temperatures from about 20° C. to about 300° C. during use of the process chamber. The protective multilayer coating comprises a bond layer and a top layer, the bond layer is formed on a chamber component to reduce the stress between the top layer and the chamber component. The reduced stress decreases or prevents particle shedding from the top layer of the multilayer coating during and after use of the process chamber. The bond layer comprises titanium, titanium nitride, aluminum, or combinations thereof, and the top layer comprises tungsten nitride.