Centerfinding for a process kit or process kit carrier at a manufacturing system
US11813757B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 13, 2020 |
| Grant date | Nov 14, 2023 |
| Priority date | — |
| Expiry date | Mar 14, 2042 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method for finding a center of a process kit and/or a process kit ring is provided. An object placed on an end effector is moved past a sensor of a manufacturing system. A first signal indicating a current shape of object is received from the sensor of the manufacturing system. A determination is made whether the first signal corresponds to a second signal indicating a predefined shape for a process kit and/or a process kit carrier. In response to a determination that the first signal corresponds to the second signal, a coordinate correspondence is determined between coordinates of a center of the object and coordinates of a center of the end effector. The determined coordinate correspondence indicates whether a current placement of the object on the end effector satisfies a target placement criterion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.