Detection of surface particles on chamber components with carbon dioxide
US11815436B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 11, 2022 |
| Grant date | Nov 14, 2023 |
| Priority date | — |
| Expiry date | Aug 11, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2015/1497
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A stream including at least one of solid CO2 particles or CO2 droplets is directed toward an article including surface particles. The stream causes at least a portion of the surface particles on the article to dislodge from a surface of the article. A purge cycle to transport at least a portion of the dislodged surface particles away from the surface of the article is initiated. The purge cycle includes generating a laminar flow at a first velocity for a first time period and subsequently generating a laminar flow at a second velocity for a second time period. A determination is made of whether a number of particles transported away from the surface of the article satisfies a particle criterion. In response to a determination that the number of particles transported away from the article does not satisfy the criterion, the purge cycle is re-initiated.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.