Inventor · Sunnyvale, CA, US

Chang Ke

15Patents

1h-index

31Co-inventors

50Inventor score

Filing activity: May 1, 2014 → Oct 24, 2023

Most-cited inventions

Patent	Title	Area	Cited by	Status
US10643840B2	Selective deposition defects removal by chemical etch	Electricity	2	Active
US11815436B2	Detection of surface particles on chamber components with carbon dioxide	Physics	1	Active
US11441974B2	Detection of surface particles on chamber components with carbon dioxide	Physics	1	Active
US12169163B2	Detection of surface particles on chamber components with carbon dioxide	Physics	0	Active
US10770292B2	Wafer treatment for achieving defect-free self-assembled monolayers	Electricity	0	Active
US11194244B2	Extreme ultraviolet mask absorber and processes for manufacture	Physics	0	Active
US11735420B2	Wafer treatment for achieving defect-free self-assembled monolayers	Electricity	0	Active
US12024770B2	Methods for selective deposition using self-assembled monolayers	Performing Operations; Transporting	0	Active
US11508610B2	Substrate support with edge seal	Electricity	0	Active
US9274570B2	Positioning apparatus for expansion card	Physics	0	Active
US12313180B2	Gas flow valve and methods of operating thereof	Emerging Cross-Sectional Technologies	0	Active
US11033930B2	Methods and apparatus for cryogenic gas stream assisted SAM-based selective deposition	Performing Operations; Transporting	0	Active
US10892161B2	Enhanced selective deposition process	Electricity	0	Active
US10950433B2	Methods for enhancing selectivity in SAM-based selective deposition	Electricity	0	Active
US11515155B2	Methods for enhancing selectivity in SAM-based selective deposition	Electricity	0	Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.