Mass spectrometer detector and system and method using the same

US11823883B2 · kind B2 · utility

Assignee

• NOVA MEASURING INSTRUMENTS INC. · IL

Inventors

• Christopher F. Bevis · Los Gatos, US
• Yungman Alan Liu · Sunnyvale, US
• David A. Reed · Belmont, US
• Eli Cheifetz · Ramat Gan, IL
• Amit Weingarten · Ramat Gan, IL
• Alexander Kadyshevitch · Tel Aviv-Yafo, IL

Key dates

• Filing date: Nov 19, 2021
• Grant date: Nov 21, 2023
• Expiry date: Nov 19, 2041

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01J2237/2445
• WIPO field: Environmental technology
• WIPO sector: Chemistry

Abstract

An ion detector for secondary ion mass spectrometer, the detector having an electron emission plate coupled to a first electrical potential and configured to emit electrons upon incidence on ions; a scintillator coupled to a second electrical potential, different from the first electrical potential, the scintillator having a front side facing the electron emission plate and a backside, the scintillator configured to emit photons from the backside upon incidence of electrons on the front side; a lightguide coupled to the backside of the scintillator and confining flow of photons emitted from the backside of the scintillator; and a solid-state photomultiplier coupled to the light guide and having an output configured to output electrical signal corresponding to incidence of photons from the lightguide. A SIMS system includes a plurality of such detectors movable arranged over the focal plane of a mass analyzer.